![]() ![]() Please ensure invoice requirements are met before submitting otherwise invoice will be rejected. Sufficient back up documentation submitted with invoice (documents required for payment).Modification issued to extend the Subcontract or SWO end date.Amount billed is within the Subcontract Work Order (SWO) value.Avoid sending duplicate copies of the invoice.Re-bill by line item and at unit prices on PO.Quantity billed is the quantity received.Please send Proof of Delivery to us at Verify good(s) and service(s) are authorized on PO. Invoice amount is within allowed funds on Purchase Order.Invoice is for services performed before purchase order (PO) expiration date.Closed-Loop Digital & Analog Control for up to 99.Frictionless, Maintenance-Free, Precision Flexure Guiding System.Longer Lifetime with Patented, Ceramic-Encapsulated Piezo Actuators.No Wear & Tear: Flexures, Actuators and Sensors are Maintenance-Free.Micro-manufacturing, Photonics and Optics Alignment, Super-Resolution Microscopy, Semiconductor Test Equipment, Scanning Probe Microscopy, Biotechnology, Surface Metrology, Quality Assurance, Nanometrology, Interferometry, Nanopositioning Motion and control parameters are stored in an ID chip on the stage for seamless controller / piezo mechanics interchangeability and plug-and-play operation. Controllers come with ample software support, LabView drivers, and diagnosis tools for servo tuning, data recording, and remote access. Multiple control interfaces such as TCP/IP, USB, SPI, and even high-bandwidth analog I/O is offered. Options span from compact, low-cost single-channel controllers to complex 12 channel high-output control systems, and from OEM boards to rack mount units.Ī choice of advanced digital servo algorithms optimized for piezo drives provide higher throughput, faster settling, and higher disturbance rejection than conventional PID-based controllers, resulting in better stability at the nanometer range and below. PI's four decades of piezo design experience is also evident in the control options. Similar performance can only be achieved with air bearings and magnetic levitation guiding systems - both technologies also offered by PI. Flexure stages provide friction-free motion with excellent straightness and flatness data. PI also offers high-speed models that settle in under one millisecond. PI flexure piezo stages can repeatedly provide nanometer and sub-nanometer size steps, and their high stiffness and advanced control algorithms allow them to move and settle quickly, within a few milliseconds. These ultra-precise piezo mechanic nanopositioning devices are a result of PI's 40 years of experience with piezo flexure positioners, developed by the world's most experienced nanopositioning design teams. Direct metrology provides higher stability and linearity compared to inferred metrology feedback - usually based on piezo resistive strain gauges, a technique also available from PI for entry level piezo nanopositioners.īest in Class Design, Millisecond Step & Settle, Sub-Nanometer Precision PIHera closed-loop stages are equipped with direct-metrology capacitive sensors and provide resolution down to the sub-nanometer-level, in a compact, FEA optimized package for high stiffness and long lifetime. Travel ranges start at 50µm and go all the way up to 1,800µm (1.8mm) - a record for flexure guided piezo stages.Ī total of 60 standard variations are available, including closed-loop, and UHV compatible versions.ĭriven by PI's proprietary PICMA® piezo ceramics (tested by NASA/JPL for 100 billion cycles and employed on the Mars Rover), PIHera piezo stages have unique properties especially important in long-term research and industrial applications.Ĭlosed-Loop, Direct- Measuring Feedback Sensors PIHera stages come in single axis (horizontal and vertical), two-axis (XY), and XYZ combinations. The PIHera flexure positioner series offers the largest variety of travel ranges and options of any high precision piezo nanopositioning stage currently available. Largest Variety: 60 Models / X, XY, Z, XYZ / 50 to 1800 µm Travel Ranges PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for nano-biotechnology, life science and photonics applications, provides the PIHera family of compact X, XY and Z flexure-guided piezo nanopositioning stages, offering record travel ranges to 1.8 millimeters. ![]()
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